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Handbook of Thin Film Deposition
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Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry. When pursuing patents, there is a phase called ‘reduction to practice’ where the idea for a technology transitions from a concept to actual use. The section ‘Thin Film Reduction to Practice’ includes chapters that review the most relevant methods to fabricate thin films towards practical applications. Then, the latest applications of thin film deposition technologies are discussed. Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists and engineers in academia and working in semiconductor R&D. Offers a practical survey of thin film technologies including design, fabrication, and quality assuranceCovers core processes and applications in the semiconductor industry and discuses latest advancesFeatures new chapters that review methods on front end and back end thin films
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