Contatto
Come acquistare
Consegna
Guida all'acquisto
Silicon Front-End Technology - Materials Processing and Modelling: Volume 532
Inglese
76 b
In preparazione
Termine sconosciuto
Fino a 30 giorni per il reso
I clienti hanno acquistato anche
As silicon-integrated circuit technology enters the sub-100nm realm, continued progress will depend on a fundamental understanding of the physics of materials processing. The high cost of processing experimental lots and the speed at which new devices brought to the market have created a new emphasis on realistic physical models incorporated in technology CAD (TCAD) simulation tools. The book brings together researchers to review recent developments in the integrated-circuit community and to identify key issues for future research in this field. Results of research on the physical mechanisms involved in silicon device processing are presented both from experimental and theoretical viewpoints. The application of this research to TCAD process simulation models is also addressed. Topics include: shallow junctions and transient enhanced diffusion; extended defects and transient enhanced diffusion; impurities and point defects; implant technology, thin films and surfaces and point defects and diffusion in SiGe.
Informazioni sul libro
Inglese
Regala questo libro oggi stesso
È facile
1 Aggiungi il libro al carrello e scegli la consegna come regalo 2 Ti invieremo subito il buono 3 Il libro arriverà all'indirizzo del destinatarioPotrebbe interessarti anche
/
In brossura
19.59
€
/
In brossura
15.59
€
/
Rigido
73.09
€
Ciao! Sono Libroamiko, il tuo consulente di libri.
Come posso aiutarti?