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Thin Films: Volume 356
Stresses and Mechanical Properties V
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Thin films have become an integral part of the technological changes currently sweeping the commercial marketplace. Applications range in scope from tooling surfaces to microelectronic components. Within all of these uses, however, performance is often limited by the mechanical properties of both the films and the structures to which they are attached. Stresses which arise during processing and service can lead to deformation and failure. In addition, thin films exhibit mechanical properties which are not simply predicted from the behavior of bulk materials. This volume, the 5th in a successful series from MRS, focuses on the latest developments in research related to mechanical properties and performance in thin-film materials.
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